Profile: Entegris Inc (ENTG.OQ)
25 Jun 2019
Entegris, Inc., incorporated on March 17, 2005, is a global developer, manufacturer and supplier of microcontamination control products, specialty chemicals and materials handling solutions for manufacturing processes in the semiconductor and other high-technology industries. The Company operates in three business segments: Specialty Chemicals and Engineered Materials (SCEM), Advanced Materials Handling (AMH) and Microcontamination Control (MC). SCEM provides process chemistries, gases, materials and delivery systems to support semiconductor and other manufacturing processes. AMH develops solutions to monitor, protect, transport, and deliver critical liquid chemistries and substrates for a set of applications in the semiconductor industry and other high-technology industries. MC offers solutions to purify critical liquid chemistries and gases used in semiconductor manufacturing processes and other high-technology industries.
Specialty Chemicals and Engineered Materials
The SCEM segment's process chemistries, gases, materials and delivery systems are utilized in semiconductor manufacturing processes, such as deposition, cleaning and integration of materials. SCEM offers specialty gas products, specialty materials products, advanced deposition materials products, and surface preparation and integration products.
The Company's specialty gas solutions provide safety and process capabilities to semiconductor manufacturers. Its Safe Delivery Source (SDS) cylinders store and deliver hazardous gases, such as arsine, phosphine, germanium and boron trifluoride, at sub-atmospheric pressure through the use of its carbon-based adsorbent materials. These products manage potential leaks during transportation and use. It also offers Vacuum Actuated Cylinders (VAC), a technology to SDS in which select implant gases are stored under high pressure but delivered sub-atmospherically.
Specialty materials products are made from specialized graphite, silicon carbide and/or various coatings and serve as components in semiconductor manufacturing equipment at various stages of the semiconductor manufacturing process, including dry or plasma etch, chemical vapor deposition and ion implant. Its Poco Graphite, Inc. (POCO) graphite is used to make consumable electrodes for electrical discharge machining, hot glass contact materials for use in glass product manufacturing and forming, and a number of graphite consumable products for various industrial applications, including aerospace, optical, medical devices and printing. Its coatings, such as its Pegasus coatings, provide corrosion and erosion resistance and desired conductivity, manage particle generation and contamination on critical components used in semiconductor and other high-technology manufacturing operations.
The Company's advanced deposition materials include liquid, gaseous and solid precursors, which are incorporated in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes by the semiconductor industry, such as its UltraPur Tetramethylsilane (4MS) and UltraPur Tetraethylorthosilicate (TEOS) products. It offers containers that allow storage and delivery of solid and liquid precursors required in ALD processes.
The Company offers a range of materials used to prepare and integrate the surface of a semiconductor wafer during the manufacturing process. For example, its Viaform product includes inorganic and organic molecules that provide the wiring for copper interconnects and allows manufacturers to eliminate processing steps. It also offers Chemical Mechanical Planarization (CMP) cleaning solutions for applications, such as semiconductor post-etch residue removal, wafer etching, organics removal, negative resist removal, edge bead removal and corrosion prevention. Its line of consumable Polyvinyl Alcohol (PVA) roller brush products are used to clean the wafer following the CMP process and its line of pad conditioners.
Advanced Materials Handling Segment
The AMH segment's systems and products manage its customers' yields by protecting wafers from abrasion, degradation and contamination during manufacturing and transportation. AMH offers wafer solutions, chemical containers and fluidics. AMH offers wafer solutions, chemical containers and fluidics.
The Company's wafer solutions included Ultrapak and Crystalpak products, for wafers ranging from 100 to 200 millimeter (mm), as of December 31, 2016. It also offered a front-opening shipping box (FOSB) for the transportation and automated interface of 300 mm wafers, as of December 31, 2016. It provided front opening unified pods (FOUPs), wafer transport and process carriers, and standard mechanical interface pods (SMIF) pods in sizes up to 300 mm, as of December 31, 2016. These microenvironment products deliver wafers to the various process fabrication steps.
The Company produces a range of flexible packaging and polymer containers that chemical companies use to ship process chemistries to semiconductor fabrication plants. It has a portfolio of packaging products, from low-volume containers to transport high-value photoresist chemistries, such as its NOWPak products, to large intermediate bulk containers, or intermediate bulk containers (IBCs), for high volume chemical consumption, such as its FluoroPure products.
The Company produces fluid transfer products, such as valves, fittings, tubing, pipe and custom fabricated products, and associated connection systems, such as its PrimeLock connections, for chemical applications. Its product line provides its semiconductor manufacturers, process tool makers and chemical customers with a single-source provider for their process chemical management needs throughout the manufacturing process. Its digital valve control technology manages chemical uniformity on wafers. Its IntelliGen integrated liquid dispense systems enable the uniform application of chemistries during the wafer fabrication process, integrating its valve control and filter device technologies.
Microcontamination Control Segment
The MC segment's filters remove chemical and nanometer-sized contaminants and bubbles from the different fluids and gases used in the manufacturing process, including photolithography, deposition, planarization and surface etching and cleaning. Its products manage defects that could result contamination altering the physical and electrical properties of its customers' products. MC offers liquid microcontamination control products, gas microcontamination control products and other products. The Company also offers water and chemical filtration products for microelectronics applications.
The Company's liquid microcontamination control products offer various products control contaminants in its customers' liquid processes. Its Torrento series of filters is an example of one line of its products used in applications for the filtration of aggressive acid and base chemistries for both semiconductor fabrication plants, as well as chemical manufacturers including its SCEM segment. Its Impact series of filters are used in photochemical dispense applications.
The Company's gas microcontamination control products offer metal filters, such as stainless steel and nickel filters. Its purifiers chemically react with and absorb contaminants, such as oxygen and water, to manage contamination, and its vent diffusers manage particle contamination and processing cycle times. Its GateKeeper gas purifiers leverage technology manage gaseous contaminants. Its Chambergard gas diffusers provide semiconductor equipment manufacturers with the capability to vent their tools to atmosphere without adding particles to the wafers under process. Under the Company's other products, it also offers its eVOLV wet chemical process to recycle electronic waste and recover metals and other materials from discarded printed circuit boards and semiconductor chips.
The Company competes with Danaher Corporation, Shin-Etsu Polymer Co., Ltd., Gemu Valves Inc., Tokyo Keiso Co., Ltd., Mersen, Versum Materials, Inc., DuPont Electronic Technologies, Dow Chemical Company, Air Liquide, Praxair, Inc., SAES Pure Gas, Inc., Donaldson Company, Inc. and Parker Hannifin Corp.
129 Concord Rd
BILLERICA MA 01821-4600
Company Web Links
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